TESTING CONDITIONS

TEST # Date Power (W) Pressure (mTorr) Time (min) Power Source (DC/RF)

1 11 May 40 10 60 DC

2 19 May 100 5 90 DC

3 7 June (BILAYER)

TOP 100 5 15

DCBOTTOM 40 10 60

CHARACTERIZATION RESULTS

TEST # Thickness (nm) Adhesion Test Resistance (Ω)

1 50 FAIL (Peeled-off after 7 min) 17.9

2 390 - 400 FAIL (Peeled-off after 5 min) 6.18

3 BILAYERTOP: 385-390

FAIL (Peeled-off after 5 min) 7.8BOTTOM: 10-15