oral presentation
Post on 19-Feb-2017
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TESTING CONDITIONS
TEST # Date Power (W) Pressure (mTorr) Time (min) Power Source (DC/RF)
1 11 May 40 10 60 DC
2 19 May 100 5 90 DC
3 7 June (BILAYER)
TOP 100 5 15
DCBOTTOM 40 10 60
CHARACTERIZATION RESULTS
TEST # Thickness (nm) Adhesion Test Resistance (Ω)
1 50 FAIL (Peeled-off after 7 min) 17.9
2 390 - 400 FAIL (Peeled-off after 5 min) 6.18
3 BILAYERTOP: 385-390
FAIL (Peeled-off after 5 min) 7.8BOTTOM: 10-15
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