BS EN ISO 14644-3Cleanrooms & associated controlled environments-Part 3:Metrology and test methods DIS

BS EN ISO 14644-3Metrology & Test MethodsCurrent Status1. DIS was issued by ISO in September 022.UK comments to BSI to be made by end December 023. LBI/30 will consider all UK comments by end January 03 4.BSI vote to CEN/ISO by end February 035. DIS is valid and can be referred to and used until it is superseded.6. Likely time when revised DIS will be available - mid 2004

BS EN ISO 14644-3Metrology & Test Methods14644-1:1999Classification of air cleanliness14644-2:2000Specifications for testing and monitoring to prove continued compliance with -114644-3:DISMetrology and test methods14644-4:2001Design, construction & start-up14644-5:FDISOperations14644-6:CDVocabulary/terminology14644-7:FDISSeparative devices14644-8:CDClassification of Airborne Molecular Contamination

BS EN ISO 14644-3Metrology & Test MethodsCurrent Status of BS 5295BS 5295 Part 0: General Introduction - CurrentBS 5295 Part 1: Classification- WithdrawnBS 5295 Part 2: Design- WithdrawnBS 5295 Part 3: Operation- CurrentBS 5295 Part 4: Compliance- Withdrawn

BS EN ISO 14644-3Metrology & Test MethodsCurrent Status of BS 5295BS 5295 Part 0: General Introduction - CurrentBS 5295 Part 1: Classification- 14644-1/3BS 5295 Part 2: Design- 14644-4BS 5295 Part 3: Operation- CurrentBS 5295 Part 4: Compliance- 14644-2

Some of BS5295 Part 1 is not addressed currently and PD6609:2000 is being revised to bridge the gap.Part 3:Operation will be covered by 14644-5:FDIS

BS EN ISO 14644-3Metrology & Test MethodsThis part of BS EN ISO 14644 may be used for the characterisation of a cleanroom as described and specified in other parts of BS EN ISO 14644.Not all cleanroom parameter test procedures are shown.Other standards may be considered to be applicableThe annexes to this document are informative. Ie they are not compulsory, but form a recommendation for compliance with the standard.Consequently, throughout the document references are made to or as agreed between customer and supplier

BS EN ISO 14644-3Metrology & Test MethodsSUMMARY OF ESSENTIAL CONTENTS:1. Scope- ISO standard text and also states that alternative methods can be used based on agreement between customer and supplier.2. Normative- Reference to standards Reference3. Terms and- Helps understanding, and Definitions allows document to exist alone4. Testing- Recommended tests with procedures Procedures and apparatus5. Test Report- Reporting & documentation

BS EN ISO 14644-3Metrology & Test MethodsItem 4 forms the crux of this section of the standard.

Recommended tests are listed in table 1. Each test has a procedure in Annex B and a corresponding set of apparatus in Annex C. The section of the standard referencing the test is also given.Selecting and scheduling of these tests is discussed in Annex A.

BS EN ISO 14644-3Metrology & Test Methods Annex AANNEX A (Informative) Choice of recommended tests of an installation and the sequence in which to carry them out

A1 Recommended test proceduresChoice of testsTable A1: Test checklist for installation propertiesTable A2: Test checklist for sequencing The checklists are useful in that they can be taken from the standard and used as a tool.

BS EN ISO 14644-3Metrology & Test Methods Annex ATest Selection & Sequence ChecklistChoose which tests are requiredPut them in a logical order for your applicationWhere not applicable put N/AReview the schedule of tests

BS EN ISO 14644-3Metrology & Test Methods Annex BANNEX B (Informative) - Test MethodsB1Airborne Particle Count (for classification)B2Ultrafine Particle Count (for characterisation)B3Macro Particle Count (for characterisation)B4Airflow TestB5Pressure Difference TestB6Installed Filter Leakage TestB7Flow VisualisationB8Airflow Direction TestB9Temperature TestB10Humidity TestB11Electrostatic & Ion Generator TestB12Particle Deposition TestB13Recovery TestB14Containment Leak Test

BS EN ISO 14644-3Metrology & Test Methods Annex BANNEX B (Informative) - Test Methods

Each section comprises items on:

Principle - what and why

Recommended test procedure - how

Recommended apparatus - with what

Test report - detailed results

BS EN ISO 14644-3Metrology & Test Methods Annex BANNEX B (Informative) - Test MethodsB1Airborne Particle Count (for classification)

Airborne test for size distributions with thresholds between 0.1 and 5 microns to certify or verify cleanliness classification

BS EN ISO 14644-3Metrology & Test Methods Annex BANNEX B (Informative) - Test MethodsB2Ultrafine Particle Count (for characterisation)

Airborne test for particles with size distribution thresholds less than 0.1 micron for characterisation of the cleanroom

BS EN ISO 14644-3Metrology & Test Methods Annex BANNEX B (Informative) - Test MethodsB3Macro Particle Count (for characterisation)

Airborne tests for particles with size distribution thresholds greater than 5 microns for characterisation of the cleanroom

BS EN ISO 14644-3Metrology & Test Methods Annex BANNEX B (Informative) - Test MethodsB4Airflow Test

Tests to evaluate airflow velocity, uniformity of airflow velocity and supply air volume depending on classification.

Airflow velocity and uniformity tests are described for use principally in unidirectional systems.Air volume tests are described for unidirectional, non unidirectional or supply air duct systems.

NB Political correctness avoids terms such as laminar and turbulent flow systems

BS EN ISO 14644-3Metrology & Test Methods Annex BANNEX B (Informative) - Test MethodsB5Air Pressure Difference Test

Verification of capability of installation to maintain the specified PD between it and its surroundings.

BS EN ISO 14644-3Metrology & Test Methods Annex BANNEX B (Informative) - Test MethodsB6Installed Filter Leakage Test

Particle Counter and Photometer tests are both described

Photometer method for ISO 5 and less (ie typically non-unidirectional), and for MPPS Filters with penetrations > 0.005% (H14 and lower to BS EN 1822) Acceptance criteria is 0.01% for all grades.

DPC method more sensitive unidirectional systems. Evaluation of scan rate and allowable particle counts is based on BS EN 1822 part 4 and DIN 24184.

BS EN ISO 14644-3Metrology & Test Methods Annex BANNEX B (Informative) - Test MethodsB6Installed Filter Leakage Test

Note error on B6.3.5 formula for scan rate

Sr

BS EN ISO 14644-3Metrology & Test Methods Annex BANNEX B (Informative) - Test MethodsB7Flow Visualisation

Tests to demonstrate airflow characteristics in the installation.Techniques described are by thread, tracer injection or image processing (CFD)

BS EN ISO 14644-3Metrology & Test Methods Annex BANNEX B (Informative) - Test MethodsB8Airflow Direction Test

Tests to demonstrate airflow directional characteristics in the installation.Techniques described are by thread, tracer injection or image processing (CFD)

BS EN ISO 14644-3Metrology & Test Methods Annex BANNEX B (Informative) - Test MethodsB9Temperature Test

Tests to demonstrate temperature characteristics in the installation.Techniques described are for general or more exacting measurement requirements.

BS EN ISO 14644-3Metrology & Test Methods Annex BANNEX B (Informative) - Test MethodsB10Humidity Test

Tests to demonstrate the humidity characteristics of the installation using measurements of dew point or relative humidity

Humidity tests should be performed in conjunction with the temperature test.

BS EN ISO 14644-3Metrology & Test Methods Annex BANNEX B (Informative) - Test MethodsB11Electrostatic & Ion Generator Test

Tests to evaluate the level of electrostatic charge and dissipation rate in the installation.

Techniques for the measurement of surface voltage and resistance as well as ioniser performance are suggested

BS EN ISO 14644-3Metrology & Test Methods Annex BANNEX B (Informative) - Test MethodsB12Particle Deposition Test

Tests to evaluate the level of particulates that can be deposited on work or surfaces in the installation.

Techniques using witness plates or a fall out photometer are suggested.

BS EN ISO 14644-3Metrology & Test Methods Annex BANNEX B (Informative) - Test MethodsB13Recovery Test

Test to evaluate the capability of the clean air system to recover from a particle generating event principally in non-unidirectional applications.

BS EN ISO 14644-3Metrology & Test Methods Annex BANNEX B (Informative) - Test MethodsB14Containment Leak Test

Test to evaluate the intrusion of contaminated air from surrounding areas using DPC or Photometer methods.

BS EN ISO 14644-3Metrology & Test Methods Annex C

Annex C (Informative) - Test Instruments

Describes test apparatus that should be used for the corresponding recommended tests in Annex B. There is a recommendation that apparatus should be subject to agreement between the customer and the supplier.

The information provided is not limiting, it represents a sensible minimum requirement. Ie Equipment that becomes available through improvements in measurement technology are not restricted by this Annex.

Equally alternate equipment may be suitable and may be used subject to agreement.

BS EN ISO 14644-3Metrology & Test Methods Annex CAnnex C (Informative) - Test Instruments - exampleC1.Discrete Particle Counter (DPC).C2.Condensation Nucleus Counter (CNC).C3.Microscope, Cascade Impactor, DPC, Time of Flight.C4.Anemometers - Thermal, Ultrasonic, Vane, Pitot, Hood.C5.Manometers - Electronic, Inclined, Mechanical.C6.Photometer, DPC, Aerosol Generator, C7.Anemometers, Tracers, Aerosol generator.C8.Anemometers, Tracers, Aerosol generator.C9.Liquid in Glass thermometer, Electronic thermometer.C10.Humidity meters; Capacitive, Hair.C11.Voltmeter, Ohmmeter, Charged plate monitor.C12.Microscope, Fall-out Meter.C13. Discrete Particle Counter (DPC). C14. Discrete Particle Counter (DPC), Photometer, Aerosol Generator.

BS EN ISO 14644-3Metrology & Test MethodsUK public comments on this section to BSI need to be made in written form and in an approved format by end December 02 otherwise they will not be considered.

This presentation has been preparedand delivered by:-Wander ter KuileMcLeod Russel UK Ltdc/o Vokes LtdHenley ParkGuildfordSurrey, GU3 2AFUKtel 01483 207236fax 01483 235384e-mail wander.ter.kuile@vokes.com